7 results
Stress corrosion of organosilicate glass films in aqueous environments: Role of pH
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- Journal:
- Journal of Materials Research / Volume 23 / Issue 3 / March 2008
- Published online by Cambridge University Press:
- 31 January 2011, pp. 862-868
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- March 2008
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Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves
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- Journal:
- Journal of Materials Research / Volume 21 / Issue 12 / December 2006
- Published online by Cambridge University Press:
- 03 March 2011, pp. 3161-3167
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- December 2006
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Zeolite Low-k Film Properties Dependence on Nanocrystal Size
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F03-08
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- 2006
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Processing damage and electrical performance of porous dielectrics in narrow spaced interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 812 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, F1.5
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- 2004
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On factors affecting the extraction of elastic modulus by nanoindentation of organic polymer films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 841 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, R5.2
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- 2004
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Understanding adhesion failure in low-k dielectric stack during Chemical-Mechanical Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 795 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, U4.3
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- 2003
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Buckling instabilities of thin cap layers deposited onto low-k dielectric films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 734 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, B9.67
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- 2002
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